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MgO barrier-perpendicular magnetic tunnel junctions with CoFe/Pd multilayers and ferromagnetic insertion layers
被引:119
|作者:
Mizunuma, K.
[1
]
Ikeda, S.
[1
]
Park, J. H.
[1
]
Yamamoto, H.
[1
,2
]
Gan, H.
[1
]
Miura, K.
[1
,2
]
Hasegawa, H.
[1
]
Hayakawa, J.
[2
]
Matsukura, F.
[1
]
Ohno, H.
[1
]
机构:
[1] Tohoku Univ, Lab Nanoelect & Spintron, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Hitachi Ltd, Adv Res Lab, Kokubunji, Tokyo 1858601, Japan
关键词:
MAGNETORESISTANCE;
ELECTRODES;
ANISOTROPY;
FILMS;
D O I:
10.1063/1.3265740
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
The authors studied an effect of ferromagnetic (Co20Fe60B20 or Fe) layer insertion on tunnel magnetoresistance (TMR) properties of MgO-barrier magnetic tunnel junctions (MTJs) with CoFe/Pd multilayer electrodes. TMR ratio in MTJs with CoFeB/MgO/Fe stack reached 67% at annealing temperature (T-a) of 200 degrees C and then decreased rapidly at T-a over 250 degrees C. The degradation of the TMR ratio may be related to crystallization of CoFe(B) into fcc(111) or bcc(011) texture resulting from diffusion of B into Pd layers. MTJs which were in situ annealed at 350 degrees C just after depositing bottom CoFe/Pd multilayer showed TMR ratio of 78% by postannealing at T-a= 200 degrees C. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3265740]
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