Preparation of a CVD thin film by an atmospheric pressure low temperature surface discharge plasma torch

被引：9
|
作者：
Kuwabara, Atsushi [1 ]
Kuroda, Shin-ichi [1 ]
Kubota, Hitoshi [1 ]
机构：
[1] Gunma Univ, Fac Engn, Dept Chem, Gunma 3768515, Japan
来源：
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2006年 / 15卷 / 03期
关键词：
D O I：
10.1088/0963-0252/15/3/005
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
We describe the preparation of a chemical vapour deposition (CVD) thin film using the low temperature surface discharge plasma torch of our previous paper, and examine the influences of preparation distance, applied voltage and preparation time on the thin film structure. The composition of the obtained CVD thin film was altered by the applied voltage and preparation distance, and it was made from an inorganic composition with a state of SiO2 under a high-applied voltage and long preparation distance.
引用
收藏
页码：328 / 331
页数：4
相关论文
共 50 条
  • [41] Surface modification of PVA thin film by nonthermal atmospheric pressure plasma for antifogging property
    Paneru, Ramhari
    Lamichhane, Pradeep
    Adhikari, Bishwa Chandra
    Ki, Se Hoon
    Choi, Jinsung
    Kwon, Jae Sung
    Choi, Eun Ha
    AIP ADVANCES, 2019, 9 (07)
  • [42] Superhydrophilization of Surface of Aluminum Thin Film by Atmospheric-Pressure Plasma Jet Irradiation
    Kuwahata, Hiroshi
    Murata, Yuki
    Hashimoto, Naoki
    Segawa, Riyuya
    E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2018, 16 : 27 - 35
  • [43] Plasma torch for supersonic plasma spray at atmospheric pressure
    Caliari, F. R.
    Miranda, F. S.
    Reis, D. A. P.
    Filho, G. P.
    Charakhovski, L. I.
    Essiptchouk, A.
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2016, 237 : 351 - 360
  • [44] The effect of plasma discharge on methane diffusion combustion in air assisted by an atmospheric pressure microwave plasma torch
    Li, Shou-Zhe
    Niu, Yu-Long
    Cao, Shu-Li
    Zhang, Jiao
    Zhang, Jialiang
    Li, Xuechen
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2022, 55 (23)
  • [45] Skin decontamination by low-temperature atmospheric pressure plasma jet and dielectric barrier discharge plasma
    Daeschlein, G.
    Scholz, S.
    Ahmed, R.
    von Woedtke, T.
    Haase, H.
    Niggemeier, M.
    Kindel, E.
    Brandenburg, R.
    Weltmann, K. -D.
    Juenger, M.
    JOURNAL OF HOSPITAL INFECTION, 2012, 81 (03) : 177 - 183
  • [46] Characteristics of Microwave Plasma Torch at Atmospheric Pressure
    Zhang, Qing
    Zhang, Guixin
    Wang, Shumin
    Wang, Liming
    Huo, Na
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2010, 38 (11) : 3197 - 3200
  • [47] The high pressure torch discharge plasma source
    Kapicka, V
    Sícha, M
    Klíma, M
    Hubicka, Z
    Tous, J
    Brablec, A
    Slavícek, P
    Behnke, JF
    Tichy, M
    Vaculík, R
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (01): : 15 - 21
  • [48] Comparative actions of a low pressure oxygen plasma and an atmospheric pressure glow discharge on the surface modification of polypropylene
    Choi, HS
    Rybkin, VV
    Titov, VA
    Shikova, TG
    Ageeva, TA
    SURFACE & COATINGS TECHNOLOGY, 2006, 200 (14-15): : 4479 - 4488
  • [49] Atmospheric pressure plasma enhanced CVD
    Hitchman, ML
    CHEMICAL VAPOR DEPOSITION, 2005, 11 (11-12) : 455 - 455
  • [50] Plasma Grooving System Using Atmospheric Pressure Surface Discharge Plasma
    Toshiyuki Hamada
    Tatsuya Sakoda
    Masahisa Otsubo
    Plasma Chemistry and Plasma Processing, 2009, 29 : 197 - 204
12345