[1] Karlsruhe Inst Technol, Inst Appl Mat, D-76344 Eggenstein Leopoldshafen, Germany
[2] Univ Freiburg, Lab Mat Proc, D-79110 Freiburg, Germany
[3] Tecnol Navarra Nanoprod SL, TECNAN, Ind Area Perguita, C-A 1, Los Arcos 31210, Spain
[4] Karlsruhe Inst Technol, Inst Microstruct Technol, D-76344 Eggenstein Leopoldshafen, Germany
[5] Univ Freiburg, Lab Nanotechnol, D-79110 Freiburg, Germany