共 50 条
- [21] Inductively coupled plasma etching of InP using CH4/H2 and CH4/H2/N2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (01): : 47 - 52
- [23] INVESTIGATION OF VIBRATIONAL-ROTATIONAL DISTRIBUTION OF HF MOLECULES FORMED IN REACTIONS OF FLUORINE-ATOMS WITH MOLECULES H2, CH4, C2H6, C2H4, C2H2, CH3CN, C3H6 BULLETIN OF THE ACADEMY OF SCIENCES OF THE USSR DIVISION OF CHEMICAL SCIENCE, 1975, 24 (03): : 463 - 468
- [27] KINETICS OF THE REACTIONS OF C2H WITH C2H2, H2, AND D2 JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (14): : 5875 - 5880
- [28] Shock tube studies on the high temperature chemical kinetics of allyl radicals:: reactions with C2H2, CH4, H2 and C3H5 at 1000-1400 K SHOCK WAVES, VOLS 1 AND 2, PROCEEDINGS, 2005, : 609 - 614