Simulation and fabrication of the SiC-based clamped-clamped filter

被引：0
|
作者：
Zhao, Yongmei [1 ,2 ]
Ning, Jin [1 ]
Sun, Guosheng [1 ,2 ]
Liu, Xingfang [1 ,2 ]
Wang, Liang [1 ,2 ]
Ji, Gang [2 ]
Wang, Lei [2 ]
Zhao, Wanshun [2 ]
Li, Jinmin [2 ]
Yang, Fuhua [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, State Key Labs Transducer Technol, Beijing 100083, Peoples R China
[2] Inst Semicond, Key Lab Semicond Mat, Beijing 100083, Peoples R China
来源：
2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4 | 2008年
基金：
中国国家自然科学基金;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the SiC-based clamped-clamped filter was designed and fabricated. The filter was composed of two clamped-clamped beam micromechanical resonators coupled by a spring coupling beam. Structural geometries, including the length and width of the resonator beam and coupling beam, were optimized by simulation for high frequency and high Q, under the material properties of SiC. The vibrating modes for the designed filter structure were analyzed by finite element analysis (FEA) method. For the optimized structure, the geometries of resonator beams and coupling beams, as well as the coupling position, the SiC-based clamped-clamped filter was fabricated by surface micromaching technology.
引用
收藏
页码：2524 / +
页数：2
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