ITO/AlNdN/Al contact process for active matrix OLED displays

被引：4
|
作者：
Kim, M. [1 ]
Jin, G. H. [1 ]
机构：
[1] Samsung Mobile Display Co Ltd, Yongin 449577, Gyeonggi Do, South Korea
来源：
ELECTRONICS LETTERS | 2009年 / 45卷 / 08期
关键词：
D O I：
10.1049/el.2009.0037
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Integrating circuits into organic light emitting diode displays requires fabrication of polycrystalline silicon (poly-Si) based thin-film transistors (TFTs) on glass substrates. A novel ITO/AlNdN/Al contact process has been developed for the pixel step. In metallisation, ITO/Al interconnection is metallurgically undesirable. An AlNdN layer is selected for a pixel material and ITO/AlNdN/Al structure is applied to the pixel line. Reported is the feasibility for the multilevel ITO/AlNdN/Al contact, which can make the poly-Si TFTs competitive in the market.
引用
收藏
页码：421 / 422
页数：2
相关论文
共 50 条
  • [41] Experimental study on the reliability of water/fluoropolymer/ITO contact in electrowetting displays
    Zhou, Rui
    Ye, Qianling
    Li, Hui
    Jiang, Hongwei
    Tang, Biao
    Zhou, Guofu
    [J]. RESULTS IN PHYSICS, 2019, 12 : 1991 - 1998
  • [42] High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
    Park, Dong-pil
    Park, Won-hyeok
    Song, Jang-kun
    Kim, Sang Soo
    [J]. JOURNAL OF INFORMATION DISPLAY, 2022, 23 (01) : 77 - 85
  • [43] A scalable manufacturing process for flexible active-matrix e-paper displays
    Burns, SE
    Reynolds, K
    Reeves, W
    Banach, M
    Brown, T
    Chalmers, K
    Cousins, N
    Etchells, M
    Hayton, C
    Jacobs, K
    Menon, A
    Siddique, S
    Too, P
    Ramsdale, C
    Watts, J
    Cain, P
    von Werne, T
    Mills, J
    Curling, C
    Sirringhaus, H
    Amundson, K
    McCreary, MD
    [J]. JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2005, 13 (07) : 583 - 586
  • [44] Active-matrix OLED on bendable metal foil
    Cheon, JH
    Choi, JH
    Hur, JH
    Jang, J
    Shin, HS
    Jeong, JK
    Mo, YG
    Chung, HK
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2006, 53 (05) : 1273 - 1276
  • [45] Micro silicon technology for active matrix OLED display
    Arai, Toshiaki
    Morosawa, Narihiro
    Hiromasu, Yasunobu
    Hidaka, Koji
    Nakayama, Tetsuo
    Makita, Atsuya
    Toyota, Motohiro
    Hayashi, Naoki
    Yoshimura, Yusuke
    Sato, Ayumu
    Namekawa, Kimiyasu
    Inagaki, Yoshio
    Umezu, Nobuhiko
    Tatsuki, Koichi
    [J]. 2007 SID INTERNATIONAL SYMPOSIUM, DIGEST OF TECHNICAL PAPERS, VOL XXXVIII, BOOKS I AND II, 2007, 38 : 1370 - 1373
  • [46] A novel high gray scale data driver for passive matrix OLED displays
    Shin, HJ
    Woo, SB
    Shin, SJ
    Kwack, KD
    Kim, TW
    [J]. PDCAT 2005: Sixth International Conference on Parallel and Distributed Computing, Applications and Technologies, Proceedings, 2005, : 836 - 839
  • [47] Active matrix OLED for rugged HMD and viewfinder applications
    Low, K
    Jones, SK
    Prache, O
    Fellowes, DA
    [J]. HELMET AND HEAD-MOUNTED DISPLAYS IX: TECHNOLOGIES AND APPLICATIONS, 2004, 5442 : 280 - 290
  • [48] A Highly Sensitive Capacitive Touch Sensor Integrated on a Thin-Film-Encapsulated Active-Matrix OLED for Ultrathin Displays
    Kim, Sunkook
    Choi, Woong
    Rim, Woojin
    Chun, Youngtea
    Shim, Hongsik
    Kwon, Hyukjun
    Kim, Jongsoo
    Kee, Inseo
    Kim, Sungchul
    Lee, SangYoon
    Park, Jongsun
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (10) : 3609 - 3615
  • [49] Novel Design of Auto-Compensation for TFT VTH and High-Speed Driving in Active-Matrix OLED Displays
    Chiu, Wen-Ching
    Chen, Po-Syun
    Lu, Chun-Ming
    Wang, Ming-Xun
    Hung, Chia-Che
    Lin, Chih-Lung
    [J]. 2017 24TH INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD), 2017, : 54 - 57
  • [50] Design aspects of low power polymer/OLED passive-matrix displays
    Sempel, A
    Büchel, M
    [J]. ORGANIC ELECTRONICS, 2002, 3 (02) : 89 - 92
12345