Nd-Fe-B films and microstructures

被引:14
|
作者
Kruusing, A [1 ]
机构
[1] Univ Oulu, Microelect & Mat Phys Labs, FIN-90014 Oulu, Finland
关键词
D O I
10.1179/095066099101528252
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The fabrication methods of Nd-Fe-B thin and thick films, methods for structuring films, and methods of making Nd-Fe-B microparts are reviewed. The dependence of film properties on deposition conditions is considered in detail. IMR/315 (C) 1999 loM Communications Ltd and ASM International.
引用
收藏
页码:121 / 140
页数:20
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