MICRO PATTERNING OF THIN ND-FE-B FILMS

被引：55
|
作者：
LEMKE, H
LANG, T
GODDENHENRICH, T
HEIDEN, C
机构：
[1] Institut für Angewandte Physik, Univ. Giessen, 35392 Giessen
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1995年 / 148卷 / 03期
关键词：
D O I：
10.1016/0304-8853(94)01705-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nd-Fe-B films of 1 mu m thickness have been prepared by dc sputtering. Structural and magnetic film properties are analyzed by using an X-ray diffractometer and a vibrating reed magnetometer. For the investigation of surface morphological properties a scanning force microscope is used. Very smooth films have been examined with regard to their applicability for micro patterning. For that purpose micrometer size magnetic marks have been patterned. Magnetic fields were calculated and compared with magnetic force microscopy images of the marks.
引用
收藏
页码：426 / 432
页数：7
相关论文
共 50 条
  • [1] A Mossbauer investigation of sputtered Nd-Fe-B thin films and Nd-Fe-B/Fe/Nd-Fe-B trilayers
    Steyaert, S
    Le Breton, JM
    Parhofer, S
    Kuhrt, C
    Teillet, J
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1999, 196 : 48 - 50
  • [2] Energy barrier analysis of Nd-Fe-B thin films
    Goto, R.
    Okamoto, S.
    Kikuchi, N.
    Kitakami, O.
    [J]. JOURNAL OF APPLIED PHYSICS, 2015, 117 (17)
  • [3] Fabrication of high coercive Nd-Fe-B based thin films through annealing Nd-Fe-B/Nd-Fe multilayers
    Tian, N.
    Li, Y. F.
    Hong, F.
    You, C. Y.
    [J]. PHYSICA B-CONDENSED MATTER, 2015, 477 : 129 - 132
  • [4] Interfacial state and magnetic properties of Nd-Fe-B/Nd thin films
    Matsuura, Masashi
    Sugimoto, Satoshi
    Goto, Ryota
    Tezuka, Nobuki
    [J]. JOURNAL OF APPLIED PHYSICS, 2009, 105 (07)
  • [5] Influence of Nd Oxide Phase on the Coercivity of Nd-Fe-B Thin Films
    Matsuura, Masashi
    Goto, Ryota
    Tezuka, Nobuki
    Sugimoto, Satoshi
    [J]. MATERIALS TRANSACTIONS, 2010, 51 (10) : 1901 - 1904
  • [6] Nd-Fe-B films and microstructures
    Kruusing, A
    [J]. INTERNATIONAL MATERIALS REVIEWS, 1999, 44 (04) : 121 - 140
  • [7] Microstructure of Nd-Fe-B films
    Tsai, JL
    Chin, TS
    Yao, YD
    Sun, ZG
    Shen, BG
    Kronmüller, H
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 2001, 37 (04) : 2582 - 2584
  • [8] Microstructure of Nd-Fe-B films
    Tsai, Jai-Lin
    Chin, Tsung-Shune
    Yao, Yeong-Der
    Sun, Zhi-Gang
    Shen, Bao-Gen
    Kronmüller, H.
    [J]. IEEE Transactions on Magnetics, 2001, 37 (4 I) : 2582 - 2584
  • [9] Texture of Nd-Fe-B thin films prepared by magnetron sputtering
    Araki, T
    Nakanishi, T
    Umemura, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1999, 85 (08) : 4877 - 4879
  • [10] Magnetic properties and magnetic domains of Nd-Fe-B thin films
    Chen, S. L.
    Liu, W.
    Zhang, D.
    Gunaratne, G. H.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 103 (02)
12345