Nonstoichiometry and solubility of impurity in In-doped PbTe films on Si substrates

被引:4
|
作者
Samoylov, AM
Buchnev, SA
Dement'ev, NN
Synorov, YV
Zlomanov, VP
机构
[1] Voronezh State Univ, Dept Chem, Voronezh 394006, Russia
[2] Moscow MV Lomonosov State Univ, Dept Chem, Moscow, Russia
关键词
nonstoichiometry; heterostructures; lead telluride; indium; doping; solid solutions;
D O I
10.1016/j.mssp.2003.07.013
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The chemical quantitative composition, phase constitution, and crystal structure of doped with In lead telluride films on Si (1 0 0) or SiO2/Si (1 0 0) substrates have been studied in this work. By EPMA and atomic absorption measurements, it has been found that the concentration of In atoms y(In) varied from 0.0011 to 0.045 in these deposited Pb1-yInyTe films. The results of EPMA, SEM, and X-ray diffraction (XRD) measurements show that formation of In solid solutions in lead telluride matrix revealed not only in PbTe-InTe cross-section, but in PbTe-ln(2)Te(3) pseudobinary system also. The results of XRD show that the lattice parameter a(PbTe) of PbTe< In >/Si and PbTe< In >/SiO2/Si heterostructures is described by nonmonotone function and does not obey the Vegard's law within concentration interval 0.0011 less than or equal to y(In) less than or equal to 0.045. (C) 2003 Published by Elsevier Ltd.
引用
收藏
页码:327 / 333
页数:7
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