CVD growth of 1D and 2D sp2 carbon nanomaterials

被引:69
|
作者
Pang, Jinbo [1 ]
Bachmatiuk, Alicja [1 ,2 ]
Ibrahim, Imad [1 ,3 ]
Fu, Lei [4 ]
Placha, Daniela [5 ]
Simha Martynkova, Grazyna [5 ]
Trzebicka, Barbara [2 ]
Gemming, Thomas [1 ]
Eckert, Juergen [1 ,6 ]
Ruemmeli, Mark H. [1 ,2 ,5 ]
机构
[1] IFW Dresden, D-01171 Dresden, Germany
[2] Polish Acad Sci, Ctr Polymer & Carbon Mat, PL-41819 Zabrze, Poland
[3] Tech Univ Dresden, Ctr Adv Elect Dresden, D-01062 Dresden, Germany
[4] Wuhan Univ, Coll Chem & Mol Sci, Wuhan 430072, Peoples R China
[5] VSB Tech Univ Ostrava, Nanotechnol Ctr, Ostrava 70833, Czech Republic
[6] Tech Univ Dresden, Inst Mat Sci, D-01062 Dresden, Germany
关键词
CHEMICAL-VAPOR-DEPOSITION; FEW-LAYER GRAPHENE; SINGLE-CRYSTAL GRAPHENE; CATALYST-FREE GROWTH; IN-SITU OBSERVATIONS; TEMPERATURE SELECTIVE GROWTH; HIGHLY EFFICIENT SYNTHESIS; FIELD-EFFECT TRANSISTORS; LARGE-AREA GRAPHENE; NANOTUBE GROWTH;
D O I
10.1007/s10853-015-9440-z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The discovery of graphene and carbon nanotubes (rolled-up graphene) has excited the world because their extraordinary properties promise tremendous developments in many areas. Like any materials with application potential, it needs to be fabricated in an economically viable manner and at the same time provides the necessary quality for relevant applications. Graphene and carbon nanotubes are no exception to this. In both cases, chemical vapor deposition (CVD) has emerged as the dominant synthesis route since it is already a well-established process both in industry and laboratories. In this work, we review the CVD fabrication of graphene and carbon nanotubes. Initially, we briefly introduce the materials and the CVD process. We then discuss pretreatment steps prior to the CVD reaction. The discussion then switches to the CVD process, provides comparative data for thermal CVD and plasma-enhanced CVD, and includes coverage of kinetics, thermodynamics, catalyst choice, and other aspects of growth as well as post production treatments. Finally, conclusions are drawn and presented.
引用
收藏
页码:640 / 667
页数:28
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