Simulation of Light Scattering in the Nanometer Range

被引:0
|
作者
Tausendfreund, Andreas [1 ]
Patzelt, Stefan [1 ]
Goch, Gert [1 ]
Rockstroh, Lars
Simon, Sven
机构
[1] Univ Bremen, D-2800 Bremen 33, Germany
来源
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D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
The available paper presents an efficient computation model to simulate light scattering measurements in the nanometer range. The new model based on a modified Huygens-Fresnel approximation enables to improve measuring methods without expensive and time consuming experiments. The model is verified by a roughness measuring principle based on a double scattering of light.
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页码:325 / 335
页数:11
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