Nb-B-C thin films for electrical contact applications deposited by magnetron sputtering

被引:19
|
作者
Nedfors, Nils [1 ]
Tengstrand, Olof [2 ]
Eklund, Per [2 ]
Hultman, Lars [2 ]
Jansson, Ulf [1 ]
机构
[1] Uppsala Univ, Dept Chem, Angstrom Lab, SE-75121 Uppsala, Sweden
[2] Linkoping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linkoping, Sweden
来源
基金
瑞典研究理事会;
关键词
NANOCOMPOSITE COATINGS;
D O I
10.1116/1.4875135
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The high wear resistance, high chemical inertness, and high electrical conductivity of magnetron-sputtered transition metal diborides make them a candidate material for sliding electrical contacts. However, their high hardness makes it difficult to penetrate surface oxides, resulting in a high electrical contact resistance. In this study, the authors have investigated how the contact resistance can be improved by the formation of softer Nb-B-C films. The Nb-B-C films were deposited by magnetron sputtering and shown to exhibit a nanocomposite microstructure consisting of nanocrystalline NbB2-x grains with a solid solution of C separated by an amorphous BCx phase. The formation of the BCx phase reduces the hardness from 41 GPa for the NbB2-x film to 19 GPa at 36 at. % C. As a consequence the contact resistance is drastically reduced and the lowest contact resistance of 35 m Omega (contact force 5N) is achieved for a film containing 30 at. % C. However, crack formation and subsequent delamination and fragmentation is observed for the C-containing Nb-B-C films in tribology tests resulting in high friction values for these films. (C) 2014 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.
引用
收藏
页数:6
相关论文
共 50 条
  • [31] Electrical and structural characterization of DLC films deposited by magnetron sputtering
    M. Massi
    H. S. Maciel
    C. Otani
    R. D. Mansano
    P. Verdonck
    Journal of Materials Science: Materials in Electronics, 2001, 12 : 343 - 346
  • [32] Electrical and optical properties of NiO films deposited by magnetron sputtering
    Guziewicz, Marek
    Grochowski, Jakub
    Borysiewicz, Michal
    Kaminska, Eliana
    Domagala, Jaroslaw Z.
    Rzodkiewicz, Witold
    Witkowski, Bartlomiej S.
    Golaszewska, Krystyna
    Kruszka, Renata
    Ekielski, Marek
    Piotrowska, Anna
    OPTICA APPLICATA, 2011, 41 (02) : 431 - 440
  • [33] Electrical and structural characterization of DLC films deposited by magnetron sputtering
    Massi, M
    Maciel, HS
    Otani, C
    Mansano, RD
    Verdonck, P
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2001, 12 (4-6) : 343 - 346
  • [34] Electrical resistance of Ti-B-Al-O thin films deposited by r.f. magnetron sputtering
    Kim, SK
    Ahn, YH
    THIN SOLID FILMS, 2000, 377 (377-378) : 772 - 775
  • [35] BCN thin films near the B4C composition deposited by radio frequency magnetron sputtering
    Lousa, A
    Esteve, J
    Muhl, S
    Martínez, E
    DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) : 502 - 505
  • [36] Magnetic and electrical properties of Co-Sm thin films deposited by dc magnetron sputtering
    Cho, HS
    Salem, JR
    Kellock, AJ
    Beyers, RB
    IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (05) : 2890 - 2892
  • [37] Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering
    Mazur, Michal
    Obstarczyk, Agata
    Posadowski, Witold
    Domaradzki, Jaroslaw
    Kielczawa, Szymon
    Wiatrowski, Artur
    Wojcieszak, Damian
    Kalisz, Malgorzata
    Grobelny, Marcin
    Szmidt, Jan
    MATERIALS, 2022, 15 (19)
  • [38] Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering
    Taysanoglu, T.
    Zayim, E. O.
    Agirseven, O.
    Yildirim, S.
    Yucel, O.
    THIN SOLID FILMS, 2019, 674 : 1 - 6
  • [39] Structure and electrical properties of MgTiO3 thin films deposited by rf magnetron sputtering
    Huang, CL
    Pan, CL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (06): : 2440 - 2445
  • [40] Electrical, optical and microstructural properties of transparent conducting GZO thin films deposited by magnetron sputtering
    You, Z. Z.
    Hua, G. J.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2012, 530 : 11 - 17