Nb-B-C thin films for electrical contact applications deposited by magnetron sputtering

被引:19
|
作者
Nedfors, Nils [1 ]
Tengstrand, Olof [2 ]
Eklund, Per [2 ]
Hultman, Lars [2 ]
Jansson, Ulf [1 ]
机构
[1] Uppsala Univ, Dept Chem, Angstrom Lab, SE-75121 Uppsala, Sweden
[2] Linkoping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linkoping, Sweden
来源
基金
瑞典研究理事会;
关键词
NANOCOMPOSITE COATINGS;
D O I
10.1116/1.4875135
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The high wear resistance, high chemical inertness, and high electrical conductivity of magnetron-sputtered transition metal diborides make them a candidate material for sliding electrical contacts. However, their high hardness makes it difficult to penetrate surface oxides, resulting in a high electrical contact resistance. In this study, the authors have investigated how the contact resistance can be improved by the formation of softer Nb-B-C films. The Nb-B-C films were deposited by magnetron sputtering and shown to exhibit a nanocomposite microstructure consisting of nanocrystalline NbB2-x grains with a solid solution of C separated by an amorphous BCx phase. The formation of the BCx phase reduces the hardness from 41 GPa for the NbB2-x film to 19 GPa at 36 at. % C. As a consequence the contact resistance is drastically reduced and the lowest contact resistance of 35 m Omega (contact force 5N) is achieved for a film containing 30 at. % C. However, crack formation and subsequent delamination and fragmentation is observed for the C-containing Nb-B-C films in tribology tests resulting in high friction values for these films. (C) 2014 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.
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页数:6
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