High Vacuum Micropump for Miniature Nanoelectronics Devices

被引：0
|
作者：
Grzebyk, Tomasz [1 ]
Gorecka-Drzazga, Anna [1 ]
Dziuban, Jan A. [1 ]
机构：
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland
来源：
2013 26TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC) | 2013年
关键词：
vacuum micropump; glow discharge; MEMS getter;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The microengineered 5x5x3.2 mm(3) silicon-glass glow-discharge high vacuum micropump has been presented in this article. Preliminary results showed very good pumping properties (p < 10(-6) hPa), more than three orders of magnitude better than NEG getter can provide. Micropump integrated with other nanoelectronics devices helps to stabilize their operation.
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页数：2
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