High Vacuum Micropump for Miniature Nanoelectronics Devices

被引：0
|
作者：
Grzebyk, Tomasz [1 ]
Gorecka-Drzazga, Anna [1 ]
Dziuban, Jan A. [1 ]
机构：
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland
来源：
2013 26TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC) | 2013年
关键词：
vacuum micropump; glow discharge; MEMS getter;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The microengineered 5x5x3.2 mm(3) silicon-glass glow-discharge high vacuum micropump has been presented in this article. Preliminary results showed very good pumping properties (p < 10(-6) hPa), more than three orders of magnitude better than NEG getter can provide. Micropump integrated with other nanoelectronics devices helps to stabilize their operation.
引用
收藏
页数：2
相关论文
共 50 条
  • [1] Micropump for Nanoelectronics devices
    Grzebyk, Tomasz
    Gorecka-Drzazga, Anna
    PRZEGLAD ELEKTROTECHNICZNY, 2012, 88 (10B): : 114 - 116
  • [2] Micropump for Generation and Control of Vacuum Inside Miniature Devices
    Grzebyk, Tomasz P.
    Gorecka-Drzazga, Anna
    Dziuban, Jan A.
    Zawada, Aleksander
    Konarski, Piotr
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2014, 23 (01) : 50 - 55
  • [3] Generation and control of vacuum inside miniature devices
    Grzebyk, T.
    Gorecka-Drzazga, A.
    Dziuban, J. A.
    Zawada, A.
    Konarski, P.
    26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, 47 : 1354 - 1357
  • [4] Field Emitters for Miniature High-Voltage Electronic Devices Operating in Technical Vacuum
    G. G. Sominskii
    V. E. Sezonov
    E. P. Taradaev
    T. A. Tumareva
    S. P. Taradaev
    A. A. Rukavitsyna
    M. E. Givargizov
    A. N. Stepanova
    Radiophysics and Quantum Electronics, 2019, 62 : 539 - 546
  • [5] Field Emitters for Miniature High-Voltage Electronic Devices Operating in Technical Vacuum
    Sominskii, G. G.
    Sezonov, V. E.
    Taradaev, E. P.
    Tumareva, T. A.
    Taradaev, S. P.
    Rukavitsyna, A. A.
    Givargizov, M. E.
    Stepanova, A. N.
    RADIOPHYSICS AND QUANTUM ELECTRONICS, 2019, 62 (7-8) : 539 - 546
  • [6] High-fidelity molecular dynamics of vacuum nanoelectronics
    Torfason, Kristinn
    Manolescu, Andrei
    Valfells, Agust
    2018 31ST INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2018,
  • [7] Prospective field emitters for miniature high voltage electronic devices operating at technical vacuum conditions
    Sominskii, G. G.
    Sezonov, V. E.
    Taradaev, E. P.
    Tumareva, T. A.
    10TH INTERNATIONAL WORKSHOP 2017 STRONG MICROWAVES AND TERAHERTZ WAVES: SOURCES AND APPLICATIONS, 2017, 149
  • [8] New devices for nanoelectronics
    Chatterjee, Pallab
    EDN, 2011, 56 (05) : 18 - 18
  • [9] NANOELECTRONICS Nothing is like a vacuum
    Stoner, Brian R.
    Glass, Jeffrey T.
    NATURE NANOTECHNOLOGY, 2012, 7 (08) : 485 - 487
  • [10] Design and simulation of a vacuum micropump
    Cui, ZJ
    Takoudis, CG
    MICROFLUIDICS AND BIOMEMS, 2001, 4560 : 263 - 273
12345