Low-loss and thermally stable TE-mode selective polymer waveguide using photosensitive fluorinated polyimide

被引：36

作者：

Kang, JW ^{[1
]}

Kim, JJ

Kim, J

Li, XD

Lee, MH

机构：

[1] Kwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 500712, South Korea

[2] Chonbuk Natl Univ, Dept Polymer Sci & Technol, Chonju 561756, Chonbuk, South Korea

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2002年 / 14卷 / 09期

关键词：

fluorinated photosensitive polyimide; high-thermal stability; low loss; TE-mode selective waveguide;

D O I：

10.1109/LPT.2002.801088

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-loss, thermally stable TE-mode selective optical waveguide was fabricated using a photosensitive fluorinated polyimide. The polymer undergoes photocrosslinking under UV exposure, thus changing its refractive index. The photocrosslinking-induced refractive index change was utilized to form channel waveguides. The propagation losses of the photosensitive fluorinated polyimide waveguides were less than 0.3 and 0.5 dB/cm for TE polarization at wavelengths of 1.3 and 1.55 mum, respectively. The measured polarization extinction ratio was higher than 29 and 28 dB at wavelengths of 1.3 and 1.55 mum, respectively. The refractive index of fluorinated polyimide film remains almost constant after being stored at 150degreesC for 600 min.

引用

页码：1297 / 1299

页数：3