The characterization and optimization of the thermal oxidation process equipment using experimental design and data transformation

被引：0
|
作者：
You Hailong [1 ]
Jia Xinzhang [1 ]
Wang Shaoxi [1 ]
机构：
[1] Xidian Univ, Dept Microelect, Xian 710071, Peoples R China
来源：
2006 25TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS | 2006年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Using design of experiment and data transformation, the model of thermal oxidation furnace is developed. The model involves six input factors and two responses. Only 16 run experiments are needed through t e fractional factorial experimental design. The Box-C x transformation method is used to transform the experimental data, and the optimum transformation style is determined. The responses are transformed so that the residuals meet the assumption of ANOVA and the model can explore more information here. After responses transformation the figure of merit for fitting, Adjust-R-2, is improved from 93.54% to 98.64%. The models are subsequently used to optirnize the thermal oxidation process. The non-uniformity of film is improved from 0.2% to 0.08% with the other specification satisfied.
引用
收藏
页码：387 / +
页数：2
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