Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion

被引：9

作者：

Singh, Alok Kumar ^{[1
]}

Pedrini, Giancarlo ^{[1
]}

Peng, Xiang ^{[2
]}

Osten, Wolfgang ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Fuer Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany

[2] Shenzhen Univ, Inst Optoelect, Nanhai Ave 3688, Shenzhen 518060, Guangdong, Peoples R China

来源：

OPTICAL ENGINEERING | 2016年 / 55卷 / 12期

关键词：

displacement measurement; digital image correlation; digital holography; optical vortices; DIGITAL IMAGE CORRELATION; INTERFEROMETRY; DEFORMATION; COMBINATION; ACCURACY;

D O I：

10.1117/1.OE.55.12.121722

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Different methods for the measurement of in-plane and out-of-plane nanodisplacements of microscopic samples are discussed and compared. It is shown that correlation methods are suited for in-plane displacement measurements and can achieve accuracies of a few nanometers. The method based on vortices tracking can be used for in-plane displacement measurements, but its accuracy is lower compared with the intensity correlation method. The holographic methods allow the measurement of in-plane and out-of-plane displacements at the same time; but in this case, a quite complex setup is required. A combination of correlation methods for in-plane measurement and digital holography for out-of-plane plane measurements is also discussed. The accuracy of the different methods was determined by comparison with a calibrated reference. (C) 2016 Society of Photo-Optical Instrumentation Engineers

引用

页数：9

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