Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion

被引：9

作者：

Singh, Alok Kumar ^{[1
]}

Pedrini, Giancarlo ^{[1
]}

Peng, Xiang ^{[2
]}

Osten, Wolfgang ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Fuer Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany

[2] Shenzhen Univ, Inst Optoelect, Nanhai Ave 3688, Shenzhen 518060, Guangdong, Peoples R China

来源：

OPTICAL ENGINEERING | 2016年 / 55卷 / 12期

关键词：

displacement measurement; digital image correlation; digital holography; optical vortices; DIGITAL IMAGE CORRELATION; INTERFEROMETRY; DEFORMATION; COMBINATION; ACCURACY;

D O I：

10.1117/1.OE.55.12.121722

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Different methods for the measurement of in-plane and out-of-plane nanodisplacements of microscopic samples are discussed and compared. It is shown that correlation methods are suited for in-plane displacement measurements and can achieve accuracies of a few nanometers. The method based on vortices tracking can be used for in-plane displacement measurements, but its accuracy is lower compared with the intensity correlation method. The holographic methods allow the measurement of in-plane and out-of-plane displacements at the same time; but in this case, a quite complex setup is required. A combination of correlation methods for in-plane measurement and digital holography for out-of-plane plane measurements is also discussed. The accuracy of the different methods was determined by comparison with a calibrated reference. (C) 2016 Society of Photo-Optical Instrumentation Engineers

引用

页数：9

共 50 条

[1] Measurement of in-plane and out-of-plane displacements for ultrasonic flaw detection
Dong, FZ
Atherton, K
Pierce, G
Culshaw, B
[J]. FIFTH EUROPEAN CONFERENCE ON SMART STRUCTURES AND MATERIALS, 2000, 4073 : 324 - 331
[2] Measurement of in-plane and out-of-plane displacements and strains using digital holographic moire
Kulkarni, Rishikesh
Gorthi, Sai Siva
Rastogi, Pramod
[J]. JOURNAL OF MODERN OPTICS, 2014, 61 (09) : 755 - 762
[3] Simultaneous Measurement of In-Plane and Out-of-Plane Displacements Using Talbot Fringe Projection
Sun, Haibin
Liu, Tingting
[J]. INTERNATIONAL JOURNAL OF OPTICS, 2020, 2020
[4] Simultaneous measurement of in-plane and out-of-plane displacements using pseudo-Wigner-Hough transform
Kulkarni, Rishikesh
Rastogi, Pramod
[J]. OPTICS EXPRESS, 2014, 22 (07): : 8703 - 8711
[5] Simultaneous out-of-plane and in-plane displacements measurement by using digital holography around a hole or indentation
Viotti, Matias R.
Kohler, Christian
Albertazzi, Armando, Jr.
[J]. OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII, 2011, 8082
[6] Simultaneous measurement of out-of-plane and in-plane displacements by phase-shifting digital holographic interferometry
Okazawa, S.
Fujigaki, M.
Morimoto, Y.
Matui, T.
[J]. Advances in Experimental Mechanics IV, 2005, 3-4 : 223 - 228
[7] AE sensor calibration for out-of-plane and in-plane displacement sensitivity
Theobald, P.
Dar, F.
[J]. ACOUSTIC EMISSION TESTING, 2006, 13-14 : 91 - +
[8] Automated system for interferometric out-of-plane and in-plane microelements measurement
Kacperski, J
Sykula, T
Kujawinska, M
Salbut, L
[J]. PHOTONICS APPLICATIONS IN ASTRONOMY, COMMUNICATIONS, INDUSTRY, AND HIGH-ENERGY PHYSICS EXPERIMENTS, 2003, 5125 : 427 - 433
[9] In-plane and out-of-plane homogenisation of masonry
Mistler, M.
Anthoine, A.
Butenweg, C.
[J]. COMPUTERS & STRUCTURES, 2007, 85 (17-18) : 1321 - 1330
[10] Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry
Pedrini, Giancarlo
Gaspar, Joao
Schmidt, Marek E.
Alekseenko, Igor
Paul, Oliver
Osten, Wolfgang
[J]. OPTICAL ENGINEERING, 2011, 50 (10)

← 1 2 3 4 5 →