Impact of Temperature on Reliability of MFIS HZO-based Ferroelectric Tunnel Junctions

被引:1
|
作者
Suenbuel, Ayse [1 ]
Ali, Tarek [1 ]
Hoffmann, Raik [1 ]
Revello, Ricardo [1 ]
Raffel, Yannick [1 ]
Duhan, Pardeep [2 ]
Lehninger, David [1 ]
Kuhnel, Kati [1 ]
Rudolph, Matthias [1 ]
Oehler, Sebastian [1 ]
Schramm, Philipp [1 ]
Czernohorsky, Malte [1 ]
Seidel, Konrad [1 ]
Kaempfe, Thomas [1 ]
Eng, Lukas M. [3 ,4 ]
机构
[1] Fraunhofer Inst Photon Microsyst IPMS, Ctr Nanoelect Technol CNT, D-01099 Dresden, Germany
[2] Indian Inst Technol IIT Ropar, Dept Elect Engn, Rupnagar 140001, Punjab, India
[3] Tech Univ Dresden, Inst Angew Phys, D-01187 Dresden, Germany
[4] Tech Univ Dresden, Ctr Excellence Complex & Topol Quantum Matter, Ctr Qmat Dresden Wurzburg Cluster Excellence EXC, D-01062 Dresden, Germany
关键词
ferroelectric tunnel junctions; FTJ; hafnium zirconium oxide; temperature impact; TDDB; HAFNIUM OXIDE; FILMS;
D O I
10.1109/IRPS48227.2022.9764585
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Hafnium oxide-based ferroelectric tunnel junctions (FTJs) are novel nonvolatile memory devices with promising advantages such as non-destructive readout in comparison to conventional ferroelectric random access memories (FRAMs). Reliability aspects of FTJ devices need to be investigated, including their endurance, retention, ferroelectric switching, breakdown characteristics, and memory window (MW). These characteristics exhibit promising results at room temperature; however, further analysis is required for different operating temperatures. Therefore, in this work, we demonstrate the FTJ device characteristics at different temperatures varying from -40 degrees C to 60 degrees C. The results indicate that high temperatures cause higher MW of FTJs, whereas the FTJ lifetime increases at lower operating temperatures.
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页数:5
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