Deep Level Transient Fourier Spectroscopy (DLTFS) and Isothermal Transient Spectroscopy (ITS) in vertical GaN-on-GaN Schottky barrier diodes

被引:1
|
作者
Raja, P. Vigneshwara [1 ,2 ]
Raynaud, Christophe [2 ]
Sonneville, Camille [2 ]
Morel, Herve [2 ]
Phung, Luong Viet [2 ]
Ngo, Thi Huong [3 ]
De Mierry, Philippe [3 ]
Frayssinet, Eric [3 ]
Maher, Hassan [4 ]
Cordier, Yvon [3 ]
Planson, Dominique [2 ]
机构
[1] Indian Inst Technol IIT Dharwad, Dept Elect Engn, Dharwad 580011, Karnataka, India
[2] Univ Lyon, Univ Claude Bernard Lyon 1, INSA Lyon, Ecole Cent Lyon,CNRS, F-69621 Villeurbanne, France
[3] Univ Cote dAzur, CRHEA, CNRS, F-06560 Valbonne, France
[4] Univ Sherbrooke, CNRS UMI LN2, Sherbrooke, PQ J1K 2R1, Canada
来源
MICRO AND NANOSTRUCTURES | 2022年 / 172卷
关键词
Free-standing GaN; Schottky barrier diode; DLTFS; Traps; Capacitance and current DLTS; Isothermal transient; TRAPS;
D O I
10.1016/j.micrna.2022.207433
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The paper explores the Deep Level Transient Fourier Spectroscopy (DLTFS) capabilities in characterizing electrically active traps in vertical GaN-on-GaN Schottky barrier diodes (SBDs). The capacitance-DLTFS (C-DLTFS) experiments reveal a prominent electron trap T2 at E-C - 0.56 eV with a density (N-T2) of 8 x 10(14) cm(-3) and a weak presence of another trap at E-C - 0.18 eV (T1) with N-T1 = 3.8 x 10(13) cm(-3) in the SBDs. The C-DLTFS acquired with two emission transients (T-E = 20.48 ms and 2.048 s) has resulted in identical trap signatures for T1 and T2. Due to the high N-T, the trap T2 at E-C - 0.56 eV is identified from the current-DLTFS (I-DLTFS) and thermally stimulated capacitance (TSCAP) measurements. Especially the TSCAP results indicate the carrier freeze-out temperature (T < 75 K) in the GaN material. Furthermore, the carrier emission kinetics of the trap T2 is evaluated by performing isothermal transient spectroscopy at a stabilized temperature. The capture time constant of T2 is estimated from the isothermal transients attained with shorter trap-filling pulse widths (<100 ns).
引用
收藏
页数:12
相关论文
共 50 条
  • [1] Comprehensive characterization of vertical GaN-on-GaN Schottky barrier diodes
    Raja, P. Vigneshwara
    Raynaud, Christophe
    Sonneville, Camille
    N'Dohi, Atse Julien Eric
    Morel, Herve
    Phung, Luong Viet
    Ngo, Thi Huong
    De Mierry, Philippe
    Frayssinet, Eric
    Maher, Hassan
    Tasselli, Josiane
    Isoird, Karine
    Morancho, Fredric
    Cordier, Yvon
    Planson, Dominique
    [J]. MICROELECTRONICS JOURNAL, 2022, 128
  • [2] Investigation of AlGaN/GaN Schottky Structures by Deep Level Fourier Transient Spectroscopy with Optical Excitation
    Stuchlikova, L.
    Kosa, A.
    Szobolovszky, R.
    Petrus, M.
    Harmatha, L.
    Delage, S. L.
    Kovac, J.
    [J]. 2016 11TH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES & MICROSYSTEMS (ASDAM), 2016, : 145 - 148
  • [3] Characterization of GaN p-n diodes using deep level transient Fourier spectroscopy
    Asghar, M
    Muret, P
    Beaumont, B
    Gibart, P
    [J]. MICROSCOPY OF SEMICONDUCTING MATERIALS 2003, 2003, (180): : 345 - 349
  • [4] DEEP LEVEL TRANSIENT FOURIER SPECTROSCOPY (DLTFS) - A TECHNIQUE FOR THE ANALYSIS OF DEEP LEVEL PROPERTIES
    WEISS, S
    KASSING, R
    [J]. SOLID-STATE ELECTRONICS, 1988, 31 (12) : 1733 - 1742
  • [5] Vertical GaN-on-GaN Trench Junction Barrier Schottky Diodes With a Slanted Sidewall
    Liu, Xinke
    Li, Bo
    Wu, Junye
    Li, Jian
    Yue, Wen
    Zhu, Renqiang
    Wang, Qi
    Li, Xiaohua
    Ben, Jianwei
    He, Wei
    Chiu, Hsien-Chin
    Xu, Ke
    Zhong, Ze
    [J]. IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2024, 12 : 34 - 38
  • [6] Deep level studies of GaN by deep level transient spectroscopy
    Saha, SL
    Khan, MRH
    Sawaki, N
    [J]. INDIAN JOURNAL OF PHYSICS, 2005, 79 (05) : 491 - 495
  • [7] Vertical GaN-on-GaN Schottky Barrier Diodes With Multi-Floating Metal Rings
    Yang, Tsung-Han
    Fu, Houqiang
    Fu, Kai
    Yang, Chen
    Montes, Jossue
    Huang, Xuanqi
    Chen, Hong
    Zhou, Jingan
    Qi, Xin
    Deng, Xuguang
    Zhao, Yuji
    [J]. IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2020, 8 : 857 - 863
  • [8] Ion-assisted gate recess process induced damage in GaN channel of AlGaN/GaN Schottky barrier diodes studied by deep level transient spectroscopy
    Ferrandis, Philippe
    Charles, Matthew
    Baines, Yannick
    Buckley, Julien
    Garnier, Gennie
    Gillot, Charlotte
    Reimbold, Gilles
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2017, 56 (04)
  • [9] Conductance Deep-Level Transient Spectroscopy and Current Transport Mechanisms in Au|Pt|n-GaN Schottky Barrier Diodes
    Gassoumi, M.
    [J]. PHYSICS OF THE SOLID STATE, 2020, 62 (04) : 636 - 641
  • [10] Conductance Deep-Level Transient Spectroscopy and Current Transport Mechanisms in Au|Pt|n-GaN Schottky Barrier Diodes
    M. Gassoumi
    [J]. Physics of the Solid State, 2020, 62 : 636 - 641