Multisensor Coordinate Measuring Technology for Micro-Features

被引：0
|
作者：
Wiedenhoefer, Thomas [1 ]
机构：
[1] Werth Messtechn GmbH, Giessen, Germany
来源：
4. FACHTAGUNG METROLOGIE IN DER MIKRO- UND NANOTECHNIK 2011: MESSPRINZIPIEN - MESSGERATE - ANWENDUNGEN | 2011年 / 2133卷
关键词：
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
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页码：17 / 28
页数：12
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