Optical micro encoder using a twin-beam VCSEL with integrated microlenses

被引：0
|
作者：
Miyajima, H
Yamamoto, E
Yanagisawa, K
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
encoder; VCSEL; microlenses;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An improved optical micro encoder using a vertical-cavity surface-emitting laser (VCSEL) is presented in this paper. A twin-beam VCSEL is used to obtain two quasi-sinusoidal signals in phase quadrature, thereby both. detection of the displacement direction and signal interpolation have become possible. Also, microlenses monolithically integrated onto the VCSEL improve resolution. The encoder size is approximately 1.5x2.0x0.6 mm(3). Displacement measurement was performed using a scale with a pitch of 20 mu m, and resolution of 0.1 mu m has been achieved with signal interpolation.
引用
收藏
页码：1233 / 1236
页数：4
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