Applications of optical fiber techniques to optical metrology

被引:0
|
作者
Bao, NK
Jin, GC
Chung, PS
机构
关键词
optical fiber; phase-shifting technique; NDT; 3D profilometry;
D O I
10.1117/12.269821
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
Optical fiber is a powerful element in optical communication and other optical techniques. A novel optical metrology based on optical fiber techniques is presented in this paper. The advantages of this technique provide not only the minitype apparatus but also a simple phase-shifting method to increase the measuring accuracy. A high birefringence fiber with a beat length of 1.2mm for phase-shifting technique is introduced. The experimental set-up and the technique principle, details will be discussed. Several application examples of optical metrology based on the optical fiber set-up are presented. The application areas include displacement measurement, 3D shape measurement and nondestructive testing. One of the important features of this advanced apparatus is its ability to apply in small object measurements for the electronic industry.
引用
收藏
页码:222 / 226
页数:5
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