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- [32] Study of Selective Dry etching Si0.7Ge0.3 with Different Plasma Source in Process of Gate-all-around FETADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XIII, 2024, 12958Liu, Enxu论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaYang, Chaoran论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaLi, Junjie论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaZhou, Na论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaXia, Longrui论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaChen, Rui论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaShao, Hua论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaGao, Jianfeng论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaKong, Zhenzhen论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaZhang, Chenchen论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaLai, Panpan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaYang, Tao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaWei, Yayi论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaLi, Junfeng论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaLuo, Jun论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R ChinaWang, Wenwu论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Sch Integrated Circuits, 3 West Beitucheng Rd, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, State Key Lab Fabricat Technol Integrated Circuit, 3 West Beitucheng Rd, Beijing 100029, Peoples R China
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Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChen, Rui论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaShao, Hua论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaGao, Jianfeng论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaZhang, Qingzhu论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaKong, Zhenzhen论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaLin, Hongxiao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaZhang, Chenchen论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaLai, Panpan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaYang, Chaoran论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaLiu, Yang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaWang, Guilei论文数: 0 引用数: 0 h-index: 0机构: Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China Hefei Natl Lab, Hefei 230088, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaZhao, Chao论文数: 0 引用数: 0 h-index: 0机构: Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaYang, Tao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaYin, Huaxiang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaLi, Junfeng论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaLuo, Jun论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaWang, Wenwu论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China Chinese Acad Sci IMECAS, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
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