Model of microsecond pulsed glow discharge in hollow cathode for mass spectrometry

被引:16
|
作者
Voronov, M. [1 ]
Ganeev, A. [1 ,2 ]
机构
[1] Lumex Ltd, St Petersburg 190005, Russia
[2] St Petersburg State Univ, Dept Chem, St Petersburg 198504, Russia
关键词
Mass spectrometry; Pulsed glow discharge; Hollow cathode; Discharge modeling; IONIZATION CROSS-SECTIONS; ELECTRON-IMPACT IONIZATION; HYBRID MODEL; MONTE-CARLO; 2-DIMENSIONAL MODEL; SPUTTERING YIELDS; FLUID MODEL; ION-SOURCE; ATOMS; COPPER;
D O I
10.1016/j.sab.2009.05.004
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A new model for microsecond pulsed glow discharge in a hollow cathode and its afterglow is described. The model is based on the Monte-Carlo method together with a new method for electrical field calculation, which is based on some phenomenological laws of plasma behavior. The afterglow model uses continuity and Poisson equations. A qualitative agreement between the model results and results published in experimental and theoretical works is demonstrated. Some processes in the microsecond pulsed discharge in the hollow cathode, such as sputtering, ionization and transfer of sample, are investigated. The model is successfully used for the optimization of the operational parameters of the time-of-flight mass spectrometer with ionization by microsecond pulsed glow discharge in a hollow cathode. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:416 / 426
页数:11
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