Roughness measurements on coupling structures for optical interconnections integrated on a printed circuit board

被引:0
|
作者
Hendrickx, Nina [1 ]
Van Erps, Jurgen [2 ]
Suyal, Himanshu [3 ]
Taghizadeh, Mohammed [3 ]
Thienpont, Hugo [2 ]
Van Daele, Peter [1 ]
机构
[1] Univ Ghent, TFCG Microsyst, Dept Informat Technol, B-9000 Ghent, Belgium
[2] Vrije Univ Brussel, TONA, Dept Appl Phys & Photon, Brussels, Belgium
[3] Heriot Watt Univ, Sch Engn & Phys Sci Phys, Edinburgh, Midlothian, Scotland
关键词
coupling structures; deep proton writing; laser ablation; laser direct writing; optical interconnects; optical waveguides; surface roughness;
D O I
10.1117/12.665387
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this paper, laser ablation (UGent), deep proton writing (DPW) and laser direct writing (HWU) are presented as versatile technologies that can be used for the fabrication of coupling structures for optical interconnections integrated on a printed circuit board (PCB). The optical layer, a highly cross-linked acrylate based polymer, is applied on an FR4 substrate. Both laser ablation and laser direct writing are used for the definition of arrays of multimode optical waveguides, which guide the light in the plane of the optical layer. In order to couple light vertically in/out of the plane of the optical waveguides, coupling structures have to be integrated into the optical layer. Out-of-plane turning mirrors, that deflect the light beam over 90 degrees, are used for this purpose. The surface roughness and angle of three mirror configurations are evaluated: a laser ablated one that is integrated into the optical waveguide, a laser direct written one that is also directly written onto the waveguide and a DPW insert that is plugged into a cavity into the waveguiding layer.
引用
收藏
页数:10
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