共 50 条
- [33] Size effect on the dynamic analysis of electrostatically actuated micro-actuators MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (05): : 1247 - 1254
- [34] Dynamic stability of electrostatically actuated initially curved shallow micro beams Continuum Mechanics and Thermodynamics, 2010, 22 : 445 - 468
- [35] Electrostatically actuated micromechanical switches JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1246 - 1249
- [36] ELECTROSTATICALLY ACTUATED COMPLIANT MICROVALVE INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B, 2013, : 721 - 729
- [38] Electrostatically actuated micromechanical switches Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1997, 15 (3 Pt 1):
- [40] Electrostatically actuated encased cantilevers BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2018, 9 : 1381 - 1389