Ultra-short KrF laser ablation of polyethersulfone films: investigation of a thick rim formation

被引：0
|
作者：
Pazokian, Hedieh [1 ]
机构：
[1] Laser & Opt Res Sch, Tehran, Iran
来源：
OPTICAL AND QUANTUM ELECTRONICS | 2016年 / 48卷 / 01期
关键词：
Ultra-short pulse; Heat affected area; Pedestal pulse; Laser ablation; PULSE; POLYIMIDE; SURFACE; SILICON; POLYMER;
D O I：
10.1007/s11082-015-0342-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A thick rim (similar to 200 mu m) formed around the ablated area following irradiation of a polyethersulfone film with ultra-short laser pulses, produced by a KrF laser. The possible mechanisms for generation of the heat affected zone around the ablated area were discussed and the reason for the formation of such a thick rim was found.
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页码：1 / 7
页数：7
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