Qualitative and quantitative characterization of outgassing from SU-8

被引：11
|
作者：
Melai, Joost [1 ]
Salm, Cora [1 ]
Wolters, Rob [1 ,2 ]
Schmitz, Jurriaan [1 ]
机构：
[1] Univ Twente, MESA Inst, NL-7500 AE Enschede, Netherlands
[2] NXP Res, Eindhoven, Netherlands
来源：
MICROELECTRONIC ENGINEERING | 2009年 / 86卷 / 4-6期
关键词：
SU-8; Outgassing; Vacuum; Mass spectrometry; Gas chromatography; Packaging; Microsystems; HIGH-ASPECT-RATIO; FABRICATION;
D O I：
10.1016/j.mee.2008.11.008
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
SU-8 is often used as a structural material in Microsystems. In this work, the outgassing characteristics from such cross-linked SU-8 layers are studied using mass spectrometry and gas-chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for crosslinked layers. The effect of hard-bakes is studied in situ by measuring at typical hard-bake temperatures. These tests indicate that a hard-bake is needed to provide good performance in UHV environments. Using gas-chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：761 / 764
页数：4
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