Enhancing sensitivity of long-period gratings by combined fiber etching and diamond-like carbon nano-overlay deposition

被引：2
|
作者：
Smietana, Mateusz [1 ]
Koba, Marcin [2 ,3 ]
Mikulic, Predrag [2 ]
Bock, Wojtek J. [2 ]
机构：
[1] Warsaw Univ Technol, Inst Microelect & Optoelect, PL-00662 Warsaw, Poland
[2] Univ Quebec Outaouais, Ctr Rech Photon, Gatineau, PQ J8X 3X7, Canada
[3] Inst Natl Telecommun, PL-02894 Warsaw, Poland
来源：
24TH INTERNATIONAL CONFERENCE ON OPTICAL FIBRE SENSORS | 2015年 / 9634卷
关键词：
optical fiber sensors; long-period gratings; refractive index sensing; thin films; diamond-like carbon; chemical vapor deposition; reactive ion etching;
D O I：
10.1117/12.2195214
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work presents an application of reactive ion etching (RIE) followed by diamond-like carbon (DLC) nano-overlay deposition using radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method for effective tuning of the refractive-index (RI) sensitivity of long-period gratings (LPGs). Both etching and deposition take place within one process. Combination of both plasma-based processes allows for well controlled tuning of the LPG sensorial response up to its operation at both dispersion turning point (DTP) of higher order cladding modes and mode transition regime. As a result of processing, RI sensitivity can be enhanced up to over 12,000 nm/RIU per single resonance in narrow RI range (1.3344-1.3355) and over 2000 nm/RIU in broader RI range (1.34-1.356).
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页数：4
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