The elastic properties and plastic behavior of two-dimensional polymer structures fabricated by laser interference lithography

被引：30
|
作者：
Choi, Taeyi [1 ]
Jang, Ji-Hyun
Ullal, Chaitanya K.
LeMieux, Melburne C.
Tsukruk, Vladimir V.
Thomas, Edwin L.
机构：
[1] Iowa State Univ, Dept Mat Sci & Engn, Ames, IA 50011 USA
[2] MIT, Dept Mat Sci & Engn, Inst Soldier Nanotechnol, Cambridge, MA 02139 USA
来源：
ADVANCED FUNCTIONAL MATERIALS | 2006年 / 16卷 / 10期
关键词：
D O I：
10.1002/adfm.200500693
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The elastic and plastic properties within a two-dimensional polymer (SU8) structure with sixfold symmetry fabricated via interference lithography are presented. There is a nonuniform spatial distribution in the elastic modulus, with a higher elastic modulus obtained for nodes. (brightest regions in the laser interference pattern) and a lower elastic modulus for beams (darkest regions in the laser interference pattern) of the photopatterned films. We suggest that such a nonuniformity and unusual plastic behavior are related to the variable material properties "imprinted" by the interference pattern.
引用
收藏
页码：1324 / 1330
页数：7
相关论文
共 50 条
  • [21] Fast Fourier transport analysis of surface structures fabricated by laser interference lithography
    Liu, Mengnan
    Dong, Litong
    Zhang, Ziang
    Li, Li
    Wang, Lu
    Song, Zhengxun
    Weng, Zhankun
    Han, Xueyan
    Zhou, Linhua
    Wang, Zuobin
    APPLIED PHYSICS EXPRESS, 2019, 12 (09)
  • [22] Air-suspended two-dimensional polymer photonic crystal slab waveguides fabricated by nanoimprint lithography
    Choi, Choon-Gi
    Han, Young-Tak
    Kim, Jin Tae
    Schift, Helmut
    APPLIED PHYSICS LETTERS, 2007, 90 (22)
  • [23] Two-dimensional DFB laser fabricated on dye-doped hybrid zirconia film by soft lithography
    周琼
    李森森
    黄朝红
    陈鹭剑
    许惠英
    刘守
    Chinese Optics Letters, 2012, 10 (05) : 30 - 33
  • [24] Two-dimensional DFB laser fabricated on dye-doped hybrid zirconia film by soft lithography
    Zhou, Qiong
    Li, Sensen
    Huang, Chaohong
    Chen, Lujian
    Xu, Huiying
    Liu, Shou
    CHINESE OPTICS LETTERS, 2012, 10 (05)
  • [25] Elastic properties of two-dimensional quasicrystals
    Grimmer, Hans
    ACTA CRYSTALLOGRAPHICA SECTION A, 2008, 64 : 459 - 464
  • [26] Nonlinear elastic behavior and anisotropic electronic properties of two-dimensional borophene
    Faghihnasiri, Mahdi
    Jafari, Homayoun
    Ramazani, Ali
    Shabani, Mostafa
    Estalaki, Sina Malakpour
    Larson, Ronald G.
    JOURNAL OF APPLIED PHYSICS, 2019, 125 (14)
  • [27] Controllable two-dimensional photonic crystal patterns fabricated by nanosphere lithography
    Han, S
    Hao, ZB
    Wang, J
    Luo, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04): : 1585 - 1588
  • [28] Fabrication of two-dimensional periodic structures in an amorphous silicon film by four-beam interference lithography
    Lee, Geon Joon
    Lee, YoungPak
    Kim, Kyung-Rae
    Jang, Moon Ik
    Yoon, Chong Seung
    Ahn, Jinho
    Son, Yong-Duck
    Jang, Jin
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006, 49 : S716 - S720
  • [29] Shape memory of a polymer grating surface fabricated by two-beam interference lithography
    Luo, Yang
    Fang, Li-Nan
    Wei, Wei-Hua
    Guan, Wei
    Dai, Yun-Zhi
    Sun, Xiang-Chao
    Gao, Bing-Rong
    APPLIED OPTICS, 2022, 61 (03) : 792 - 796
  • [30] Patterning of two-dimensional photonic crystal structures by nanoimprint lithography
    Chen, A.
    Wang, B. Z.
    Chua, S. J.
    Wilhelmi, O.
    Mahmood, Shahrain B.
    Saw, B. T.
    Kong, J. R.
    Moser, H. O.
    INTERNATIONAL JOURNAL OF NANOSCIENCE, VOL 5, NOS 4 AND 5, 2006, 5 (4-5): : 559 - +
12345