The elastic properties and plastic behavior of two-dimensional polymer structures fabricated by laser interference lithography

被引：30
|
作者：
Choi, Taeyi [1 ]
Jang, Ji-Hyun
Ullal, Chaitanya K.
LeMieux, Melburne C.
Tsukruk, Vladimir V.
Thomas, Edwin L.
机构：
[1] Iowa State Univ, Dept Mat Sci & Engn, Ames, IA 50011 USA
[2] MIT, Dept Mat Sci & Engn, Inst Soldier Nanotechnol, Cambridge, MA 02139 USA
来源：
ADVANCED FUNCTIONAL MATERIALS | 2006年 / 16卷 / 10期
关键词：
D O I：
10.1002/adfm.200500693
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The elastic and plastic properties within a two-dimensional polymer (SU8) structure with sixfold symmetry fabricated via interference lithography are presented. There is a nonuniform spatial distribution in the elastic modulus, with a higher elastic modulus obtained for nodes. (brightest regions in the laser interference pattern) and a lower elastic modulus for beams (darkest regions in the laser interference pattern) of the photopatterned films. We suggest that such a nonuniformity and unusual plastic behavior are related to the variable material properties "imprinted" by the interference pattern.
引用
收藏
页码：1324 / 1330
页数：7
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