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Study of Enhanced Impact Ionization in Strained-SiGe p-Channel Metal-Oxide-Semiconductor Field-Effect Transistors
被引:0
|作者:
Huang, Po-Chin
[1
]
Kang, Ting-Kuo
[2
]
Wang, Bo-Chin
[2
]
Wu, San-Lein
[2
]
Chang, Shoou-Jinn
[1
]
机构:
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan
[2] Cheng Shiu Univ, Dept Elect Engn, Niaosong Township 833, Kaohsiung Cty, Taiwan
关键词:
SUBSTRATE CURRENT;
MOSFETS;
ALLOYS;
ELECTRON;
VOLTAGE;
DEVICES;
LAYERS;
PMOS;
D O I:
10.1143/JJAP.48.04C038
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
The impact ionization phenomenon in strained-SiGe p-channel metal-oxide-semiconductor field-effect transistors (pMOSFETs) with a single quantum well (SQW) is investigated. From the universal relationship between impact ionization efficiency and the electric field in the pinch-off region, the strain-induced increase in the impact ionization efficiency of strained-SiGe pMOSFETs with different Ge contents can be attributed to a decrease in band gap energy, taking into account the increased mean free path of the hole in the SQW-SiGe channel. (C) 2009 The Japan Society of Applied Physics
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