Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining

被引：87

作者：

Kim, Sung Hoon ^{[1
]}

Sohn, Ik-Bu ^{[2
]}

Jeong, Sungho ^{[1
]}

机构：

[1] Gwangju Inst Sci & Technol, Sch Informat & Mechatron, Kwangju 500712, South Korea

[2] Gwangju Inst Sci & Technol, Adv Photon Res Inst, Kwangju 500712, South Korea

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 24期

关键词：

Femtosecond laser ablation; Ceramic; Alumina; Aluminum nitride; THRESHOLDS; SILICON; GROOVES; SINGLE; DAMAGE;

D O I：

10.1016/j.apsusc.2009.04.058

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Femtosecond laser ablation of aluminum oxide (Al2O3) and aluminum nitride (AlN) ceramics was performed under normal atmospheric conditions (lambda = 785 nm, tau(p) = 185 fs, repetition rate = 1 kHz), and threshold laser fluencies for single- and multi-pulse ablation were determined. The ablation characteristics of the two ceramics showed similar trends except for surface morphologies, which revealed virtually no melting in Al2O3 but clear evidence of melting for AlN. Based on subsequent X-ray photoelectron spectroscopy (XPS) analyses, the chemistry of these ceramics appeared to remain the same before and after femtosecond laser ablation. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：9717 / 9720

页数：4

共 50 条

[21] Excimer laser ablation of aluminum nitride
Lumpp, JK
Allen, SD
JOURNAL OF MATERIALS RESEARCH, 1997, 12 (01) : 218 - 225
[22] Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics
Chen, Yigao
Cao, Yejie
Wang, Yiguang
Zhang, Ligong
Shao, Gang
Zi, Jinfeng
CERAMICS INTERNATIONAL, 2020, 46 (07) : 9741 - 9750
[23] Ultrashort-laser-pulse machining characteristics of aluminum nitride and aluminum oxide
Chen, B. C.
Ho, C. Y.
Wen, M. Y.
Chen, C. S.
Ma, C.
Tsai, Y. H.
CERAMICS INTERNATIONAL, 2015, 41 : S191 - S196
[24] Femtosecond laser ablation of an aluminum target in air
Kang Xiao-Wei
Chen Long
Chen Jie
Sheng Zheng-Ming
ACTA PHYSICA SINICA, 2016, 65 (05)
[25] Ablation characteristics of cubic-boron nitride ceramic with femtosecond and picosecond laser pulses
Hirayama, Y
Obara, M
JOURNAL OF APPLIED PHYSICS, 2001, 90 (12) : 6447 - 6450
[26] Thermoluminescent Dosimeters Based on Aluminum Oxide and Aluminum Nitride Ceramics
Aluker, N. L.
Artamonov, A. S.
Gimadova, T., I
Zverev, A. S.
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2021, 64 (06) : 860 - 868
[27] Thermoluminescent Dosimeters Based on Aluminum Oxide and Aluminum Nitride Ceramics
N. L. Aluker
A. S. Artamonov
T. I. Gimadova
A. S. Zverev
Instruments and Experimental Techniques, 2021, 64 : 860 - 868
[28] Femtosecond laser micromachining of aluminum surfaces under controlled gas atmospheres
Robinson, GM
Jackson, MJ
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 2006, 15 (02) : 155 - 160
[29] Ablation of BN ceramics by femtosecond and picosecond laser pulses
Hirayama, Y
Obara, M
XIII INTERNATIONAL SYMPOSIUM ON GAS FLOW AND CHEMICAL LASERS AND HIGH-POWER LASER CONFERENCE, 2000, 4184 : 586 - 589
[30] Femtosecond Laser Micromachining of Aluminum Surfaces Under Controlled Gas Atmospheres
Robinson, G. M.
Jackson, M. J.
SURFACE ENGINEERING, PROCEEDINGS, 2006, : 214 - 218

← 1 2 3 4 5 →