Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining

被引：87
|
作者：
Kim, Sung Hoon [1 ]
Sohn, Ik-Bu [2 ]
Jeong, Sungho [1 ]
机构：
[1] Gwangju Inst Sci & Technol, Sch Informat & Mechatron, Kwangju 500712, South Korea
[2] Gwangju Inst Sci & Technol, Adv Photon Res Inst, Kwangju 500712, South Korea
来源：
APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 24期
关键词：
Femtosecond laser ablation; Ceramic; Alumina; Aluminum nitride; THRESHOLDS; SILICON; GROOVES; SINGLE; DAMAGE;
D O I：
10.1016/j.apsusc.2009.04.058
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Femtosecond laser ablation of aluminum oxide (Al2O3) and aluminum nitride (AlN) ceramics was performed under normal atmospheric conditions (lambda = 785 nm, tau(p) = 185 fs, repetition rate = 1 kHz), and threshold laser fluencies for single- and multi-pulse ablation were determined. The ablation characteristics of the two ceramics showed similar trends except for surface morphologies, which revealed virtually no melting in Al2O3 but clear evidence of melting for AlN. Based on subsequent X-ray photoelectron spectroscopy (XPS) analyses, the chemistry of these ceramics appeared to remain the same before and after femtosecond laser ablation. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：9717 / 9720
页数：4
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