Microcrystalline silicon, grain boundaries and role of oxygen

被引:15
|
作者
Kocka, J. [1 ]
Stuchlikova, H. [1 ]
Ledinsky, M. [1 ]
Stuchlik, J. [1 ]
Mates, T. [1 ]
Fejfar, A. [1 ]
机构
[1] Acad Sci Czech Republ, Inst Phys, Prague 16253 6, Czech Republic
关键词
Microcrystalline silicon; Grain boundaries; Electronic transport; Hydrogen; Oxygen; TRANSPORT; DISCONTINUITIES; GROWTH;
D O I
10.1016/j.solmat.2009.01.013
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
The authors report on the correlation of the oxygen content for three high growth-rate series of thin Si films crossing the boundary between amorphous and microcrystalline growth together with the evolution of the prefactor and the activation energy of the dark d.c. conductivity. The different roles of oxygen, such as doping, alloying or defect passivation, are discussed in the framework of the model of transport based on the formation of large grain boundaries with an increased band gap due to hydrogen and/or oxygen alloying. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:1444 / 1447
页数:4
相关论文
共 50 条
  • [21] PASSIVATION OF GRAIN-BOUNDARIES IN SILICON
    SEAGER, CH
    SHARP, DJ
    PANITZ, JKG
    DAIELLO, RV
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 430 - 435
  • [22] EFFECT OF OXYGEN AND CARBON SEGREGATION ON THE ELECTRICAL-PROPERTIES OF GRAIN-BOUNDARIES IN SILICON
    PIZZINI, S
    BORSANI, F
    ACCIARRI, M
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 4 (1-4): : 353 - 358
  • [23] The role of high energy boundaries and coincidence boundaries in the secondary recrystallization of grain-oriented silicon steel
    Jirou Harase
    Ryo Shimizu
    Jae-Kwan Kim
    Jong SooWoo
    Metals and Materials, 1999, 5 : 429 - 435
  • [24] The role of high energy boundaries and coincidence boundaries in the secondary recrystallization of grain-oriented silicon steel
    Harase, J
    Shimizu, R
    Kim, JK
    SooWoo, J
    METALS AND MATERIALS INTERNATIONAL, 1999, 5 (05) : 429 - 435
  • [25] Effects of oxygen impurity on microcrystalline silicon films
    Kamei, T
    Wada, T
    Matsuda, A
    CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000, 2000, : 784 - 787
  • [26] Role of bonding and coordination in the atomic structure and energy of diamond and silicon grain boundaries
    Keblinski, P
    Wolf, D
    Phillpot, SR
    Gleiter, H
    JOURNAL OF MATERIALS RESEARCH, 1998, 13 (08) : 2077 - 2099
  • [27] ROLE OF GRAIN-BOUNDARIES IN HOT-PRESSING SILICON-CARBIDE
    BIND, JM
    BIGGERS, JV
    JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5171 - 5174
  • [28] Role of bonding and coordination in the atomic structure and energy of diamond and silicon grain boundaries
    P. Keblinski
    D. Wolf
    S. R. Phillpot
    H. Gleiter
    Journal of Materials Research, 1998, 13 : 2077 - 2100
  • [29] Role of hydrogen in hydrogenated microcrystalline silicon
    Itoh, T
    Yamamoto, K
    Harada, H
    Yamana, N
    Yoshida, N
    Inouchi, H
    Nonomura, S
    Nitta, S
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 66 (1-4) : 239 - 244
  • [30] Role of hydrogen for microcrystalline silicon formation
    Saitoh, K
    Kondo, M
    Fukawa, M
    Nishimiya, T
    Futako, W
    Shimizu, I
    Matsuda, A
    AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY-1998, 1998, 507 : 843 - 853