The organic low-k materials microstructure study

被引：1
|
作者：
Du, AY [1 ]
Tung, CH [1 ]
Lu, D [1 ]
Gui, D [1 ]
Chow, YF [1 ]
机构：
[1] Inst Microelect, Singapore 117685, Singapore
来源：
PROCEEDINGS OF THE 9TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS | 2002年
关键词：
D O I：
10.1109/IPFA.2002.1025646
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：179 / 182
页数：4
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