Fabrication of diffractive optical elements with arbitrary surface-relief profile by direct laser writing

被引：9
|
作者：
Wang, C [1 ]
Chan, YC [1 ]
Lam, YL [1 ]
机构：
[1] Nanyang Technol Univ, Photon Res Grp, Sch Elect & Elect Engn, Singapore 639798, Singapore
来源：
OPTICAL ENGINEERING | 2002年 / 41卷 / 06期
关键词：
fabrication process; diffractive optical elements; laser writing;
D O I：
10.1117/1.1476689
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new method is developed to precisely control the key parameters for fabricating high quality diffractive optical elements with any surface-relief profiles. For the case of direct laser writing on photoresists these parameters include the laser intensity, laser writing speed, etc. A computer control system has been programmed to compute the corresponding laser intensity incremental step and the spacing of adjacent scans and control of the optimized process for fabricating diffractive optical elements. The compensation due to the laser variation over time has also been considered in the program. An example of a fabricated diffractive optical element and its optical performance is also demonstrated. (C) 2002 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码：1240 / 1245
页数：6
相关论文
共 50 条
  • [21] Excimer laser fabrication of diffractive optical elements
    Winfield, RJ
    Meister, M
    Crean, GM
    Paineau, S
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2000, 3 (5-6) : 481 - 486
  • [22] Fabrication Technology of the Centrosymmetric Continuous Relief Diffractive Optical Elements
    Wang Duoshu
    Luo, Chongtai
    Xiong, Yuqing
    Chen, Tao
    Liu, Hongkai
    Wang, Jizhou
    [J]. PROCEEDING OF THE FOURTH INTERNATIONAL CONFERENCE ON SURFACE AND INTERFACE SCIENCE AND ENGINEERING, 2011, 18
  • [23] Fabrication of transmissive diffractive optical elements for the mid-infrared with a laser writing instrument
    Calixto, S.
    Perez-Herrera, Gil A.
    Strojnik, A.
    Servin, A.
    Malacara, Zacarias
    Duarte-Quiroga, Reyna A.
    [J]. JOURNAL OF APPLIED RESEARCH AND TECHNOLOGY, 2007, 5 (02) : 74 - 88
  • [24] CHARACTERIZATION OF THE SURFACE RELIEF OF FILM DIFFRACTIVE OPTICAL ELEMENTS
    Kaminskaya, T. P.
    Popov, V. V.
    Saletsky, A. M.
    [J]. COMPUTER OPTICS, 2016, 40 (02) : 215 - 224
  • [25] Modeling focusing characteristics of low F-number diffractive optical elements with continuous relief fabricated by laser direct writing
    Shan, Mingguang
    Tan, Jiubin
    [J]. OPTICS EXPRESS, 2007, 15 (25): : 17032 - 17037
  • [26] Direct laser-writing of complex photopolymer structures using diffractive optical elements
    Suyal, Himanshu
    Waddie, Andrew J.
    Taghizadeh, Mohammad R.
    McCarthy, Aongus
    Walker, Andy C.
    [J]. MICRO-OPTICS, VCSELS, AND PHOTONIC INTERCONNECTS II: FABRICATION, PACKAGING, AND INTEGRATION, 2006, 6185
  • [27] Laser processing of sapphire and fabrication of diffractive optical elements
    Gottumukkala, N. R.
    Gupta, M. C.
    [J]. APPLIED OPTICS, 2022, 61 (09) : 2391 - 2397
  • [28] Analysis and optimization of fabrication of continuous-relief diffractive optical elements
    Hessler, T
    Rossi, M
    Kunz, RE
    Gale, MT
    [J]. APPLIED OPTICS, 1998, 37 (19): : 4069 - 4079
  • [29] Design and fabrication of Diffractive Optical Elements with complex profile by interference
    Liu, Juan
    Shi, Rui
    Zhao, Haozhi
    Wang, Yongtian
    [J]. INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2013: OPTICAL STORAGE AND DISPLAY TECHNOLOGY, 2013, 8913
  • [30] Laser writing systems and technologies for fabrication of binary and continuous-relief diffractive optical elements - art. no. 67320X
    Poleshchuk, A. G.
    Korolkov, V. P.
    [J]. INTERNATIONAL CONFERENCE ON LASERS, APPLICATIONS, AND TECHNOLOGIES 2007: LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES, 2007, 6732 : X7320 - X7320
12345