Developing Self-powered High Performance Sensors: Part I - A Tri-axial Piezoelectric Accelerometer with an Error Compensation Method

被引：0
|
作者：
Zhu, Yifan [1 ]
Wang, Dong F. [1 ,2 ]
Fu, Yupeng [1 ]
Yang, Xu [1 ]
机构：
[1] Jilin Univ, Sch Mech Sci & Engn, Micro Engn & Micro Syst Lab JML, Changchun 130022, Peoples R China
[2] AIST, Res Ctr Ubiquitous MEMS & Micro Engn, Tsukuba, Ibaraki 3058564, Japan
来源：
2018 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP) | 2018年
基金：
中国国家自然科学基金;
关键词：
self-powered; electromagnetic; piezoelectric; tri-axial accelerometer; compensation method; VIBRATION ENERGY HARVESTERS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper firstly proposes a self-powered piezoelectric tri-axial accelerometer, based on the electromagnetic energy harvesting mechanism. Secondly, the structure of seismic mass is improved to harvest more power under the horizontal vibration. The optimized output power reaches 10mW under horizontal vibration at 100Hz, according to the simulation results. In the end, the loss of accuracy due to power-supply part is analyzed and an error compensation method is presented.
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页数：4
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