共 50 条
- [31] Discharge Current and Charged Species' Temporal-spatial Distribution of AC Corona Discharge in SF6 Gaodianya Jishu/High Voltage Engineering, 2021, 47 (09): : 3355 - 3366
- [33] Silicon etch using SF6/C4F8/Ar gas mixtures JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2014, 32 (04):
- [34] An experimental study on SF6 gas decomposition by high-voltage pulsed discharge 2005 Annual Report Conference on Electrical Insulation and Dielectric Phenomena, 2005, : 681 - 684
- [35] Optical properties and decomposition mechanisms of SF6 at different partial discharge determined by infrared spectroscopy AIP ADVANCES, 2018, 8 (06):
- [37] MODELLING OF THE PROCESSES INVOLVED IN THE TEMPORAL EVOLUTION OF THE AR METASTABLE ATOMS DENSITY IN THE AFTERGLOW OF HIGH VOLTAGE PULSED DISCHARGES ROMANIAN JOURNAL OF PHYSICS, 2011, 56 : 83 - 89
- [38] An optical emission spectroscopy study of a reactive magnetron sputtering Ar-O2 discharge modulated at low frequency SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3): : 681 - 685
- [39] Optical emission spectroscopy study of a reactive magnetron sputtering Ar-O2 discharge modulated at low frequency Surf Coat Technol, 1-3 (681-685):
- [40] Study of SF6 and SF6/O2 plasmas in a hollow cathode reactive ion etching reactor using Langmuir probe and optical emission spectroscopy techniques PLASMA SOURCES SCIENCE & TECHNOLOGY, 2010, 19 (02):