Normal incidence infrared modulator based on single quantum well intersubband transitions

An infrared modulator of which the working principle is based on evanescent wave generation and intersubband transitions in a single AlGaAs/GaAs quantum well is presented here. CO2 laser light at normal incidence is coupled to an evanescent wave by means of a sub-wavelength diffraction grating. Modulation of the zeroth order reflective mode is achieved by applying an electric field across the quantum well. The model for deriving the complex refractive index of the quantum well region is presented and used for numerical diffraction efficiency simulations as a function of the groove height and period. Two specimens with different groove heights were fabricated. Experiments are conducted at a wavelength of 10.6 mu m. At this wavelength a relatively strong absolute modulation depth of about 20% could be observed. The experimental results are in good agreement with our model and diffraction efficiency calculations.