POLYMER NANO-BRAGG GRATING WAVEGUIDE USING MEMS PROCESS

被引：0
|
作者：
Chang, W. C. [1 ]
Yarn, K. F. [2 ]
Chuang, W. C. [3 ]
机构：
[1] So Taiwan Univ Technol, Dept Elect Engn, Tainan, Taiwan
[2] Far E Univ, Dept Elect Engn, Tainan, Taiwan
[3] Natl Formosa Univ, Dept Electroopt Engn, Huwei, Yulin, Taiwan
来源：
DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES | 2009年 / 4卷 / 01期
关键词：
Polymer; Nano-Bragg; Waveguide; MEMS process; LITHOGRAPHY; FABRICATION; TECHNOLOGY; FILTERS;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A polymer waveguide is successfully fabricated by a new method, which is implemented by a Micro-Electro-Mechanical System (MEMS) process including a stamping transfer technique incorporated with holographic interference, a lithography procedure and soft molding tecnnology. The polymers used in these experiments are OG146 and OG154 with different refractive indices. The near-field measurement for the channel waveguide has shown that the polarization dependent loss is very low. This process is simple, easy and suitable for mass production.
引用
收藏
页码：199 / 204
页数：6
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