Process of crystallization in thin amorphous tin oxide film

被引:22
|
作者
Kobayashi, T
Kimura, Y
Suzuki, H
Sato, T
Tanigaki, T
Saito, Y
Kaito, C
机构
[1] Ritsumeikan Univ, Fac Sci & Engn, Dept Nanophys Frontier Project, Shiga 5258577, Japan
[2] Kyoto Inst Technol, Dept Elect & Informat Sci, Sakyo Ku, Kyoto 6068585, Japan
关键词
crystal morphology; crystal structure; crystallites; oxides;
D O I
10.1016/S0022-0248(02)01445-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Amorphous tin oxide films deposited on carbon substrates have been studied by high-resolution transmission electron microscopy. As-deposited film was composed of a mixture of microcrystallites of SnO, SnO2 and SnO3 with size of 2 nm. Crystallization took place above 450degreesC. SnO crystals appeared between 450degreesC and 500degreesC, whereas SnO2 crystals appeared above 550degreesC. The appearance of beta-tin crystals with the reduction of tin oxide has been verified using the heating stage of the electron microscope. A drop of liquid tin was recognized upon heating above 500degreesC. The difference in crystallization upon applying an electron beam, synchrotron radiation and heating in vacuum has been summarized and discussed with respect to the problem of the excitation of crystallites. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:143 / 150
页数:8
相关论文
共 50 条
  • [41] Crystallization kinetics and role of stress in Al induced layer exchange crystallization process of amorphous SiGe thin film on glass
    Sain, Twisha
    Singh, Ch Kishan
    Ilango, S.
    Mathews, T.
    JOURNAL OF APPLIED PHYSICS, 2019, 126 (12)
  • [42] MICROSTRUCTURE OF AMORPHOUS INDIUM OXIDE AND TIN OXIDE THIN-FILMS
    RAUF, IA
    BROWN, LM
    SCRIPTA METALLURGICA ET MATERIALIA, 1994, 30 (06): : 797 - 801
  • [43] Indium tin oxide/InGaZnO bilayer stacks for enhanced mobility and optical stability in amorphous oxide thin film transistors
    Chung, Yoon Jang
    Kim, Un Ki
    Hwang, Eun Suk
    Hwang, Cheol Seong
    APPLIED PHYSICS LETTERS, 2014, 105 (01)
  • [44] Excimer laser crystallization of amorphous indium-tin oxide thin films and application to fabrication of Bragg gratings
    Hosono, H
    Kurita, M
    Kawazoe, H
    THIN SOLID FILMS, 1999, 351 (1-2) : 137 - 140
  • [45] Excimer laser crystallization of amorphous indium-tin oxide thin films and application to fabrication of Bragg gratings
    Hosono, H
    Kurita, M
    Kawazoe, H
    2ND INTERNATIONAL CONFERENCE ON COATINGS ON GLASS, ICCG: HIGH-PERFORMANCE COATINGS FOR TRANSPARENT SYSTEMS IN LARGE-AREA AND/OR HIGH-VOLUME APPLICATIONS, 1999, : 209 - 212
  • [46] High mobility transparent thin-film transistors with amorphous zinc tin oxide channel layer
    Chiang, HQ
    Wager, JF
    Hoffman, RL
    Jeong, J
    Keszler, DA
    APPLIED PHYSICS LETTERS, 2005, 86 (01) : 013503 - 1
  • [47] High-stability oxygen sensor based on amorphous zinc tin oxide thin film transistor
    Chen, Yu-Chun
    Chang, Ting-Chang
    Li, Hung-Wei
    Chung, Wan-Fang
    Wu, Chang-Pei
    Chen, Shih-Ching
    Lu, Jin
    Chen, Yi-Hsien
    Tai, Ya-Hsiang
    APPLIED PHYSICS LETTERS, 2012, 100 (26)
  • [48] Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors
    Liu P.-T.
    Chang C.-H.
    Fuh C.-S.
    Liu, Po-Tsun (ptliu@mail.nctu.edu.tw), 2016, Royal Society of Chemistry (06) : 106374 - 106379
  • [49] Electrical Properties of Amorphous Zinc-Indium-Tin Oxide Semiconductor Thin-Film Transistors
    Li, Chih-Wei
    Chang, Sheng-Po
    Chang, Shoou-Jinn
    NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 2014, 6 (04) : 273 - 278
  • [50] Optimisation of amorphous zinc tin oxide thin film transistors by remote-plasma reactive sputtering
    Niang, K. M.
    Cho, J.
    Heffernan, S.
    Milne, W. I.
    Flewitt, A. J.
    JOURNAL OF APPLIED PHYSICS, 2016, 120 (08)