High-density read-only-memory disc mastering using direct-focus laser beam recorder

The authors have developed a novel laser beam mastering apparatus using a deep-UV (DUV) laser for a high-density optical disc. A direct focusing mechanism, where the recording beam itself is also used for focusing, is applied in the laser beam recorder (LBR). The mechanism solves the focus depth issue and provides stable focusing. The evaluation results for the 23.3-Gbytes-capacity read-only-memory (ROM) disc revealed that uniform recording can be realized. Jitter variations in the tangential and radial directions were suppressed to less than 0.2% and 0.07%, respectively. A low residual tracking error signal was also attained. The measurement results for the 25-Gbyte-capacity disc show reasonable jitter not only for a resist/glass disc, but also for an injection-molded disc. The tilt margin of the disc confirmed that the disc was practical for application in the market. Furthermore, the evaluation of the 27 GByte disc indicated the possibility of higher density ROM disc mastering.