Manufacture of 27GB read-only-memory disc using deep-UV beam recorder with two-dimensional optical compensation

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[1] Yoshioka, Terufumi
[2] Chika, Yuzuru
[3] Adachi, Kazuyoshi
[4] Sugiyama, Toshinori
[5] 1,Kiyono, Kenjiro
[6] 1,Nagai, Tadakazu
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Yoshioka, T. | 1600年 / Japan Society of Applied Physics卷 / 43期
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