Selective formation of diamond-like carbon coating by surface catalyst patterning

被引:6
|
作者
Palnichenko, AV
Mátéfi-Tempfli, M
Mátéfi-Tempfli, S
Issi, JP
Piraux, L
Charlier, JC
机构
[1] Catholic Univ Louvain, Unite Phys Chim & Phys Mat, B-1348 Louvain, Belgium
[2] Catholic Univ Louvain, Res Ctr Microscop & Nanoscop Mat & Elect Device, CERMIN, B-1348 Louvain, Belgium
[3] Russian Acad Sci, Inst Solid State Phys, Chernogolovka 142432, Moscow, Russia
关键词
diamond-like carbon; coating; plasma deposition; scanning electron microscopy; Raman spectroscopy;
D O I
10.1016/j.carbon.2004.03.004
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:1879 / 1882
页数:4
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