Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography

被引：0
|
作者：
Evsikov, I. D. [1 ]
Demin, G. D. [1 ]
Glagolev, P. Yu [1 ]
Djuzhev, N. A. [1 ]
Makhiboroda, M. A. [1 ]
Chkhalo, N., I [2 ]
Salashchenko, N. N. [2 ]
Kolos'ko, A. G. [3 ]
Popov, E. O. [3 ]
机构：
[1] Natl Res Univ Elect Technol MIET, R&D Ctr MEMSEC, Moscow, Russia
[2] RAS, Inst Phys Microstruct, Nizhnii Novgorod, Russia
[3] AF Ioffe Phys Tech Inst, St Petersburg, Russia
来源：
2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS) | 2020年
关键词：
D O I：
10.1109/PowerMEMS49317.2019.20515806524
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
This paper discusses the technological prospects for creating afield emitter array for the efficient conversion of electron energy to X-ray radiation in a portable X-ray source. Fabrication process of a field emission array and X-ray transparent beryllium membrane is proposed. Three-dimensional model of field emission array combined with beryllium membrane was created in COMSOL Multiphysics. Dependence of X-ray conversion coefficient vs. voltage between a field-emission array and beryllium membrane was calculated and dependence of electron energy vs. electron beam radius was obtained as a result of electron transport simulation.
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页数：4
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