Characteristics of the RE Negative Ion Source Using a Mesh Grid Bias Method

被引:0
|
作者
Fukumasa, O. [1 ]
Okada, J. [1 ]
Tauchi, Y. [1 ]
Oohara, W. [1 ]
Tsumori, K. [2 ]
Takeiri, Y. [2 ]
机构
[1] Yamaguchi Univ, Grad Sch Sci & Engn, Tokiwadai 2-16-1, Ube, Yamaguchi 7558611, Japan
[2] Natl Inst Fus Sci, Toki, Gifu 5095292, Japan
来源
NEGATIVE IONS, BEAMS AND SOURCES | 2009年 / 1097卷
基金
日本学术振兴会;
关键词
Negative ion source; RF plasma; mesh grid bias method; magnetic filter method; ELECTRON-TEMPERATURE CONTROL; VOLUME PRODUCTION; PLASMAS; DENSITIES;
D O I
暂无
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using a mesh grid bias method for plasma parameter control, volume production of hydrogen negative ions H- is studied in pure hydrogen rf plasmas. Relationship between the extracted H- ion currents and plasma parameters is discussed. Both high and low electron temperature T, plasmas are produced in the separated regions when the grid is negatively biased. In addition, with changing grid potential V-g, values of n(e) increase while T-e decrease in their values. The negative ion production depends strongly on the grid potential and related plasma conditions. It is also confirmed that grid bias method is more effective than the so-called magnetic filter method to optimize plasma parameters for H- production. Production of deuterium negative ions D- is also studied briefly.
引用
收藏
页码:109 / +
页数:2
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