Microengraving of a potassium dihydrogen phosphate crystal by laser ablation technique

被引：0

作者：

Moagar-Poladian, G ^{[1
]}

Ulieru, D ^{[1
]}

Sandu, C ^{[1
]}

Bulinski, M ^{[1
]}

Dinescu, A ^{[1
]}

Danila, M ^{[1
]}

Gavrila, R ^{[1
]}

机构：

[1] Natl Inst Res & Dev Microtechnol Bucharest, Bucharest 72996, Romania

来源：

MEMS, MOEMS, AND MICROMACHINING | 2004年 / 5455卷

关键词：

KDP crystal; laser micro-engraving; integrated optics; electro-optic modulators;

D O I：

10.1117/12.544992

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present proof-of-principle results regarding the possibility of micro-engraving Potassium Dihydrogen Phosphate (KDP) crystals using laser ablation techniques. The results of the work show that this technique can be used for realizing integrated optics and micro-optics components that are based on such crystals, one of the envisaged directions being that of integrated electro-optical modulators.

引用

页码：375 / 380

页数：6

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